JPH0148694B2 - - Google Patents

Info

Publication number
JPH0148694B2
JPH0148694B2 JP57019105A JP1910582A JPH0148694B2 JP H0148694 B2 JPH0148694 B2 JP H0148694B2 JP 57019105 A JP57019105 A JP 57019105A JP 1910582 A JP1910582 A JP 1910582A JP H0148694 B2 JPH0148694 B2 JP H0148694B2
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric
vibrator
piezoelectric thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57019105A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58137317A (ja
Inventor
Takeshi Inoe
Yoichi Myasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57019105A priority Critical patent/JPS58137317A/ja
Priority to US06/465,316 priority patent/US4456850A/en
Publication of JPS58137317A publication Critical patent/JPS58137317A/ja
Publication of JPH0148694B2 publication Critical patent/JPH0148694B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/588—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP57019105A 1982-02-09 1982-02-09 圧電薄膜複合振動子 Granted JPS58137317A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57019105A JPS58137317A (ja) 1982-02-09 1982-02-09 圧電薄膜複合振動子
US06/465,316 US4456850A (en) 1982-02-09 1983-02-09 Piezoelectric composite thin film resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57019105A JPS58137317A (ja) 1982-02-09 1982-02-09 圧電薄膜複合振動子

Publications (2)

Publication Number Publication Date
JPS58137317A JPS58137317A (ja) 1983-08-15
JPH0148694B2 true JPH0148694B2 (en]) 1989-10-20

Family

ID=11990197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57019105A Granted JPS58137317A (ja) 1982-02-09 1982-02-09 圧電薄膜複合振動子

Country Status (2)

Country Link
US (1) US4456850A (en])
JP (1) JPS58137317A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9531342B2 (en) 2014-01-23 2016-12-27 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter and duplexer

Families Citing this family (178)

* Cited by examiner, † Cited by third party
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